One experimental PhD scholarship (Physics / Chemistry / Materials Science / Electrical Engineering or related) Atomic Layer Deposition (ALD) and analytics
Within the DFG-funded International Research Training Group (IRTG) 1215 Materials and Concepts for Advanced 
Interconnects and Nanosystems, One (1) PhD position (m/f) at Chemnitz University of Technology is available from 1 April 2012 with respect to the subproject
G1 – Advanced processes, materials and their integration into nanoelectronics interconnect systems.
This experimental project focuses on the integration of different processes for atomic layer deposition (ALD) of metals and metal nitrides as well as oxides for applications in ULSI interconnects and magnetic thin film systems. For these applications, also the integration of the ALD films for the controlled coating of three-dimensional nanostructures like patterned ultralow-k dielectrics or nanomaterials such as carbon nanotubes (CNTs) is of interest. Depending on the materials systems and ALD precursors chosen, the surface chemistry may vary and may need to be altered by in-situ or ex-situ pre-treatments. Therefore, this PhD project will particularly comprise studying surface and gas-phase processes occurring during thermal and plasma-enhanced ALD of metallic and non-metallic thin films by a variety of in-situ and ex-situ methods, such as mass spectrometry, Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS). Ideally, the PhD candidate has already some experience in some of the following fields:
– Metal-organic chemistry
– Surface physics / surface chemistry
– Analytical methods, such as scanning and transmission electron microscopy (SEM/TEM), focused ion beam microscopy (FIB), X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy, mass spectrometry, Raman spectroscopy, spectroscopic ellipsometry, quartz crystal microbalance
– Thin film deposition by atomic layer deposition (ALD) or chemical vapor deposition (CVD)
– Thin film deposition equipment
– High vacuum and ultra-high vacuum (UHV) equipment
– Working in a cleanroom environment
These activities are carried out in close relation to theoretical work in the field of simulation and modeling of ALD processes and equipment. Consequently, a communicative candidate is sought who is willing to interact with the theorists on a regular basis.
For further details concerning the scientific topics please contact Dr. Thomas Waechtler (thomas.waechtler@zfm.tu-chemnitz.de). General information about this PhD program may be found online at http://www.zfm.tu-chemnitz.de/irtg.
We welcome applications of highly qualified graduates with a Diploma, a Master’s degree or comparable qualification in Physics, Chemistry, Materials Science, Electrical Engineering or related fields. A strong interest for multidisciplinary research is required. Good knowledge of the English and German languages, both spoken and written, is essential. Successful participation in the study program of the IRTG as well as the participation in the exchange program with the Chinese partner universities is required.
PhD candidates will receive a regular salary for scientific staff according to the tariff EG 13 TV-L. The PhD position is limited until 31st December, 2012, subject to extension up to a maximum total duration of 36 months. Within this time, the PhD thesis must be completed.
Please send your documents until 29th February 2012 to:
Dr.-Ing. Thomas Waechtler
Chemnitz University of Technology
Center for Microtechnologies
Reichenhainer Strasse 70
D-09107 Chemnitz
Germany
E-Mail: thomas.waechtler@zfm.tu-chemnitz.de
Chemnitz University of Technology is seeking to increase the fraction of female staff in academia. Qualified women are therefore especially encouraged to apply. Applications of equally qualified handicapped people will be considered preferentially.
The program start in April 2012 for a duration of 36 months. The working languages are German or English. The PhD thesis could be written in English or in German.
Requirements for Applicant
Subject Requirements (Qualification)
Master of Science or equivalent in Physics, Chemistry, Materials Science, or Engineering
Type of Persons
PhD student
Compulsory Attachments
- Curriculum vitae
- Copy of university degree
- Letter of motivation
- Exposé of doctoral project
- Letters of Recommendation and list of publications are appreciated
Host institution:
University / Organisation
Technische Universität Chemnitz
09111 Chemnitz
Faculty / Institute
Center for Microtechnologies
Chemnitz
http://www.zfm.tu-chemnitz.de/irtg/
Supervisor of the Doctoral Thesis
Herr Prof. Dr. Thomas Gessner
http://www.zfm.tu-chemnitz.de/irtg
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